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AMAT 300mm MCA E-Chuck ESC Heater Part Number 0010-64702
Part Number:
0010-64702
Wafer Substrat:
300mm (12 inci)
Design:
MCA (Multi-Chamber Architecture) / Centura / Producer platforms
Part Number:
0010-64702
Wafer Substrat:
300mm (12 inci)
Design:
MCA (Multi-Chamber Architecture) / Centura / Producer platforms
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